thyrcont圖拉特真空計VSR53E

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發(fā)布時間：2018-01-07 16:39:11

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產(chǎn)品概述

圖拉特真空計VSR53E

Thyracont-Smartline-Vakuumtransmitter-VSR54DL-3055-59.jpg

VSR53E Vacuum Transducer ● DN16KF ● EtherCAT

The combination of piezo and Pirani sensor in the digital VSR vacuum transducer with EtherCAT interface offers high precision and excellent resolution in the rough and fine vacuum range.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represents cutting edge technology providing safe, precise and cost effective process control.

描述

Wide measuring range due to combination sensor piezo / Pirani
High accuracy and optimal resolution over the whole measuring range
Excellent reproducibility and long term stability
Digital RS485 interface and EtherCAT
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data
Vacuum connection using stainless steel small flange DN 16 KF

應(yīng)用

Load locks
Analysis technology
Coating plants
Vacuum furnaces
Leakages tests
Operational control of roughing pumps
Process engineering

技術(shù)參數(shù)

WEIGHT	0.220 kg
MEASURING PRINCIPLE	Membran piezoresistiv / Pirani
MATERIALS IN CONTACT WITH VACUUM	Stainless steel 1.4307, nickel, gold, silicon oxide, tungsten, glass
MEASUREMENT RANGE	1200 – 1e-4 mbar (900 – 1e-4 Torr), max. overpressure 4 bar abs.
ACCURACY	1200 – 10 mbar: ±0.3% full scale 10 – 2e-3 mbar: ±10% from reading
REPEATABILITY	1200-10 mbar: ±0,1 % full scale, 10-2e-3 mbar: ±2% from reading
REACTION TIME	1200 – 10 mbar: < 30ms (piezo) 10 – 2e-3 mbar: < 100 ms (Pirani)
POWER SUPPLY	20 – 30 VDC
ELECTRICAL CONNECTION	M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4 pol.
POWER CONSUMPTION	2.5 W, additionally 0.8 W for EtherCAT / relays /LCD
OPERATING TEMPERATURE	+5…+60°C (rel. humidity max . 80% at 30°C noncondensing)
STORAGE TEMPERATURE	-40…+65°C
MAX. BAKE OUT TEMPERATURE	125°C at the flange
SERIAL INTERFACE	RS485: 9.6 kBd to 115 kBd, address switch 1 – 16
SWITCH POINT	2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
VACUUM CONNECTION	DN 16 ISO-KF
PROTECTION CLASS	IP54