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thyrcont圖拉特真空計VSI17D
The digital cold cathode transducer VSI measures absolute pressure in the high vacuum range.
Its microcontroller intelligence allows for individual adjustment of sensor parameters to the application.
描述
Cathode sensor is controlled either automatically or manually by the user
Fast ignition due to a special technology
Insensitive against inrush of air due to automatic switch-off
Connector for protection class IP54 available
Easily replaceable sensor heads with stored calibration data
Digital and analog output signal / interfaces: 2.199 – 7.801 Volt, RS485
Output signal scalable according to required output characteristics for an easy replacement of existing transducers
應(yīng)用
Coating plants and vapor deposition
Industrial furnaces
Process engineering
Sputtering plants
Analytical instruments
Measuring and controlling in high vacuum
技術(shù)參數(shù)
| WEIGHT | 0.555 kg |
|---|---|
| DIMENSIONS | 6.9 x 4.8 x 15.3 cm |
| MEASURING PRINCIPLE | Cold cathode ionization sensor (inverted magnetron), depending on gas type |
| MATERIALS IN CONTACT WITH VACUUM | Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic |
| MEASUREMENT RANGE | 2e-3 – 5e-9 mbar (Torr), max. overpressure 10 bar abs. |
| ACCURACY | 2e-3 mbar – 2e-8 mbar: < 25% from reading |
| REPEATABILITY | 2e-3 – 2e-8 mbar: Approx. ±7% from reading |
| CATHODE VOLTAGE | Max. 2,5 kV |
| POWER SUPPLY | 20 – 30 VDC |
| ELECTRICAL CONNECTION | D-Sub, 15-pin, male; optional: FCC68 (P_VSI003) |
| POWER CONSUMPTION | Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD |
| OPERATING TEMPERATURE | +5…+60°C |
| STORAGE TEMPERATURE | -40…+65°C |
| MAX. BAKE OUT TEMPERATURE | 160°C at flange (electronic detached) |
| OUTPUT SIGNAL | 0 – 10 VDC, measuring range 1.819 – 8.6 VDC, log., 0.6 V/decade configurable; resistor > 10kOhm |
| SERIAL INTERFACE | RS485: 9.6 kBd to 115 kBd, address switch 1 – 16 |
| SWITCH POINT | 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA |
| VACUUM CONNECTION | DN 25 ISO-KF |
| PROTECTION CLASS | IP40, IP54 with counter plug – see accessories |
附件
