thyrcont圖拉特真空計(jì)VSI17E

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發(fā)布時(shí)間：2018-01-07 19:06:32

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thyrcont圖拉特真空計(jì)VSI17E

Thyracont-Smartline-Vakuumtransmitter-VSM77DL-3075-79-DL.jpg

VSI17E Vacuum Transducer ● DN25KF ● EtherCAT

The digital cold cathode transducer VSI with EtherCAT interface measures absolute pressure in the high vacuum range.
Its microcontroller intelligence allows for individual adjustment of sensor parameters to the application.

描述

Cathode sensor is controlled either automatically or manually by the user
Fast ignition due to a special technology
Insensitive against inrush of air due to automatic switch-off
Easily replaceable sensor heads with stored calibration data
Digital RS485 interface and EtherCAT

應(yīng)用

Coating plants and vapor deposition
Industrial furnaces
Process engineering
Analytical instruments
Sputtering plants
Measuring and controlling in high vacuum

技術(shù)參數(shù)

WEIGHT	0.555 kg
DIMENSIONS	6.9 x 4.8 x 15.3 cm
MEASUREMENT RANGE	2e-3 – 5e-9 mbar (Torr), max. overpressure 10 bar abs.
ACCURACY	2e-3 mbar – 2e-8 mbar: < 25% from reading
CATHODE VOLTAGE	Max. 2,5 kV
ELECTRICAL CONNECTION	M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol.
POWER CONSUMPTION	Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD
OPERATING TEMPERATURE	+5…+60°C
STORAGE TEMPERATURE	-40…+65°C
MAX. BAKE OUT TEMPERATURE	160°C at flange (electronic detached)
SERIAL INTERFACE	RS485: 9.6 kBd to 115 kBd, address switch 1 – 16, EtherCAT
SWITCH POINT	not available
VACUUM CONNECTION	DN 25 ISO-KF
PROTECTION CLASS	IP54