thyrcont圖拉特真空計VSM78E

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發(fā)布時間：2018-01-07 20:10:37

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產品概述

thyrcont圖拉特真空計VSM78E

Thyracont-Smartline-Vakuumtransmitter-VSM77DL-3075-79-DL.jpg

VSM78E Vacuum Transducer ● DN40KF ● EtherCAT

The digital combination transducer VSM (Pirani/cold cathode) with EtherCAT interface measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.

描述

Wide range sensor Pirani / cold cathode
Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime
Robust sensor design, insensitive against inrush of air
Digital RS485 interface and EtherCAT
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data

應用

Mass spectrometry
Coating plants and vapor deposition
Measuring and controlling in fine and ultrahigh vacuum
Process engineering
Sputtering plants
Vacuum furnaces

技術參數

WEIGHT	0.555 kg
DIMENSIONS	6.9 x 4.8 x 15.3 cm
MEASURING PRINCIPLE	Pirani / inverted magnetron, both depending on gas type
MATERIALS IN CONTACT WITH VACUUM	Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic
MEASUREMENT RANGE	1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs.
ACCURACY	1000 – 10 mbar: < 30 % from reading 10 – 2e-3 mbar: < 10 % from reading 2e-3 mbar – 1e-8 mbar: < 25% from reading
REPEATABILITY	10 – 1e-2 mbar: Approx. ±2% from reading, 1e-2-1e-8 mbar: Approx. ±7% from reading
RESPONSE TIME	200 ms (1s for activating the cold cathode)
CATHODE VOLTAGE	Max. 2.5 kV
POWER SUPPLY	20 – 30 VDC
ELECTRICAL CONNECTION	M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol.
POWER CONSUMPTION	Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD
OPERATING TEMPERATURE	+5…+60°C
STORAGE TEMPERATURE	-40…+65°C
MAX. BAKE OUT TEMPERATURE	160°C at flange (electronic detached)
SERIAL INTERFACE	RS485: 9.6 kBd to 115 kBd, address switch 1 – 16
SWITCH POINT	not available
VACUUM CONNECTION	DN 40 ISO-KF
PROTECTION CLASS	IP54