Combination Pump

所屬分類：anelva
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發(fā)布時間：2018-01-20 12:17:52

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產(chǎn)品概述

Combination Pump

Combination pump combines the titanium sublimation pump with the triode ion pump (noble pump) to economically increase pumping speed while maintaining the feature of ion pump which can easily obtain clean ultra high vacuum.

Features

Increased pumping speed
Compared to ion pump, the cost (including cost of control equipment) per pumping speed 1L/s is approximately 1/2 to 1/3.
Light weight and compact
Compared to ion pump with the same pumping speed, the volume and weight are reduced to 1/5 to 1/10. Therefore, it can be easily attached/removed to/from the pumped system to achieve high pumping speed with minimum space.

Applications

Deposition apparatus, electron microscopes, mass spectrometers, vacuum furnaces, various analysis equipment, experimental equipment, pumping equipment and other ultra-high vacuum systems with large gas discharge.

Specifications

400L/s Combination Pump

Pumping rate/Pumping flow	See Fig. 1
Operating pressure range	10^-1Pa to 10^-9Pa
Baking temperature	MAX250℃
Weight	Approx. 15kg
Intake flange	φ152ICF flange
Approximate capacity	4.5L
Applicable controller	922-9119 Sublimation Pump Controller and PIC-052NP 20/60L/s Noble Pump Controller

Fig. 1

800L/s Combination Pump

Pumping rate/Pumping flow	See Fig. 2
Operating pressure range	10^-1Pa to 10^-9Pa
Baking temperature	MAX 250℃
Weight	Approx. 25kg
Intake flange	φ203ICF flange
Approximate capacity	Approx. 7.5L
Applicable controller	922-9119 Sublimation Pump Controller and PIC-052NP 20/60L/s Noble Pump Controller

Fig. 2

1600L/s Combination Pump

Pumping rate/Pumping flow	See Fig. 3
Operating pressure range	10^-1Pa to 10^-9Pa
Baking temperature	MAX 250℃
Weight	Approx. 35kg
Intake flange	Inlet flange φ253ICF flange
Approximate capacity	Approx. 15.5L
Applicable controller	922-9119 Sublimation Pump Controller and PIC-052NP 20/60L/s Noble Pump Controller