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The digital cold cathode transducer VSI with EtherCAT interface measures absolute pressure in the high vacuum range.
Its microcontroller intelligence allows for individual adjustment of sensor parameters to the application.
描述
Cathode sensor is controlled either automatically or manually by the user
Fast ignition due to a special technology
Insensitive against inrush of air due to automatic switch-off
Easily replaceable sensor heads with stored calibration data
Digital output signal RS485 and EtherCAT
Robust industrial design, rugged, EMI-proof metal housing
Low magnetic stray field
應(yīng)用
Coating plants and vapor deposition
Industrial furnaces
Process engineering
Analytical instruments
Sputtering plants
Measuring and controlling in high vacuum
技術(shù)參數(shù)
Coating plants and vapor deposition
Industrial furnaces
Process engineering
Analytical instruments
Sputtering plants
Measuring and controlling in high vacuum