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您好，歡迎您光臨昆山熙日機(jī)械設(shè)備有限公司！
聯(lián)系人： 張小姐
手 機(jī)：13913143077
聯(lián)系人：李先生
手 機(jī)：15895662155
郵 箱：kssunnyjx@126.com
Ｑ?。眩?191890920
微 信：kssunnyjx
網(wǎng) 址：www.leybold-inficon.com
The POWER Eco series cryo pump is a high performance energy saving cryo pump designed to reduce power consumption and cooling water flow.
Energy and resource saving
Power consumption and cooling water reduced by 15 to 70%
Reduced regeneration/startup time
Less than half of previous product. (compared with our previous product)
Improved pumping performance
Substantial argon pumping capacity increased 1.5 to 4 times. (compared with our previous product)
Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment)
Electronic component manufacturing equipment
Vacuum evaporation systems
Vacuum furnaces, space chambers
Accelerators
Various high vacuum equipment
| Pump Type | P-085C | P-086C | P-086CL | P-087C | P-106C | P-106CL | P-126C | P-126CL | P-127C | Remarks | |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Diameter | 8inch | 8inch | 8inch | 8inch | 10inch | 10inch | 12inch | 12inch | 12inch | ||
| Shape | Vertical | Vertical | Horizontal | Vertical | Vertical | Horizontal | Vertical | Horizontal | Vertical | ||
| Pumping speed (L/S) | Nitrogen | 1,500 | 1,500 | 1,500 | 1,500 | 2,400 | 2,400 | 4,000 | 4,000 | 4,000 | |
| Argon | 1,300 | 1,300 | 1,300 | 1,300 | 2,000 | 2,000 | 3,200 | 3,200 | 3,200 | ||
| Hydrogen | 1,000 | 2,500 | 2,200 | 1,000 | 3,800 | 3,700 | 6,000 | 6,000 | 3,000 | ||
| Water | 4,000 | 4,000 | 4,000 | 4,000 | 6,400 | 6,400 | 9,000 | 9,000 | 9,000 | ||
| Maximum pumping flow(Pa·m3/s) | 1.2 | 1.2 | 1.1 | 1.2 | 1.0 | 1.0 | 0.8 | 0.8 | 0.8 | ||
| Maximum gas instantaneous tolerance(Pa·m3) | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | ||
| Startup time(min) | 60 | 65 | 80 | 60 | 85 | 100 | 95 | 105 | 70 | *1 | |
| Regeneration (heat-up) time(min) | 40 | 40 | 45 | 40 | 45 | 50 | 45 | 50 | 40 | *1 | |
| Startup regeneration time(min) | 100+α | 105+α | 125+α | 100+α | 130+α | 150+α | 140+α | 155+α | 110+α | *1 | |
| Pumping capacity (Pa·m3) | Argon | 80,000 | 80,000 | 80,000 | 150,000 | 160,000 | 140,000 | 260,000 | 200,000 | 400,000 | *2 |
| Hydrogen | 1,300 | 1,800 | 1,600 | 1,300 | 2,000 | 1,800 | 2,400 | 2,200 | 1,600 | ||
| Ultimate temperature(K) | 15 or less | ||||||||||
| Ultimate pressure(Pa) | Approx. 10-7 | ||||||||||
| Maximum heating temperature(℃) | 70 | ||||||||||
| Ambient temperature range(℃) | 10 to 35 | ||||||||||
| Recommended maintenance interval(h) | Within 16,000h | ||||||||||
| Weight(kg) | 22 | 22 | 22 | 23 | 24 | 25 | 29 | 30 | 29 | ||
| Number of operable units | P-421CA | 3* | 3* | 3* | 3* | 2* | 2* | 2* | 2* | 2* | *3、*4 |
| P-875CA | 5 | 5 | 5 | 5 | 4 | 4 | 4 | 4 | 4 | *3 | |
| Pump Type | P-128C | P-128CL | P-160C | P-161C | P-161CL | P-166C | P-201C | P-206C | P-226C | Remarks | |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Diameter | 12inch | 12inch | 16inch | 16inch | 16inch | 16inch | 20inch | 20inch | 22inch | ||
| Shape | Vertical | Horizontal | Vertical | Vertical | Horizontal | Vertical | Vertical | Vertical | Vertical | ||
| Pumping speed (L/S) | Nitrogen | 4,000 | 4,000 | 8,000 | 8,000 | 7,400 | 8,000 | 13,000 | 13,000 | 17,000 | |
| Argon | 3,200 | 3,200 | 5,500 | 5,500 | 5,000 | 5,500 | 9,000 | 9,000 | 11,000 | ||
| Hydrogen | 6,000 | 5,000 | 5,500 | 11,000 | 10,000 | 11,000 | 17,000 | 17,000 | 23,000 | ||
| Water | 9,000 | 9,000 | 17,000 | 17,000 | 17,000 | 17,000 | 28,000 | 28,000 | 39,000 | ||
| Maximum pumping flow(Pa·m3/s) | 2.2 | 2.2 | 2.2 | 2.0 | 2.2 | 3.5 | 1.3 | 3.0 | 2.7 | ||
| Maximum gas instantaneous tolerance(Pa·m3) | 40 | 40 | 50 | 50 | 50 | 50 | 80 | 80 | 133 | ||
| Startup time(min) | 110 | 115 | 70 | 90 | 120 | 80 | 150 | 100 | 120 | *1 | |
| Regeneration (heat-up) time(min) | 70 | 70 | 40 | 60 | 60 | 60 | 70 | 80 | 80 | *1 | |
| Startup regeneration time(min) | 180+α | 185+α | 110+α | 150+α | 180+α | 140+α | 220+α | 180+α | 200+α | *1 | |
| Pumping capacity (Pa·m3) | Argon | 270,000 | 200,000 | 400,000 | 400,000 | 200,000 | 400,000 | 800,000 | 800,000 | 1,000,000 | *2 |
| Hydrogen | 4,000 | 3,500 | 1,600 | 3,400 | 3,000 | 3,400 | 4,500 | 7,500 | 7,500 | ||
| Ultimate temperature(K) | 15 or less | ||||||||||
| Ultimate pressure(Pa) | Approx. 10-7 | ||||||||||
| Maximum heating temperature(℃) | 70 | ||||||||||
| Ambient temperature range(℃) | 10 to 35 | ||||||||||
| Recommended maintenance interval(h) | Within 16,000h | ||||||||||
| Weight(kg) | 33 | 34 | 50 | 50 | 65 | 50 | 60 | 60 | 87 | ||
| Number of operable units | P-421CA | 1 | 1 | 1 | 1 | 1 | - | 1 | - | - | *4 |
| P-875CA | 2 | 2 | 2 | 2 | 2 | 1 | 2 | 1 | 1 | *3 | |
