Maximum lnlet P ressure

150 psig

Normal Operating Pressure  Differential

(with atmospheric pressure at the. MFCoutlet)

10 to 5000 sccm

10000 to 20000 sccm

10 to 40 psid

15 to 40 psid

Control Range

2% to 100% of F.S 

Accuracy (analog)

(including non-linearity, hysteresis,

and non-repeata bility referenced to 760mmhg and 0°c)

±1.0% of F.S

Repeatability

±0.2% of F.S

Resolution

1.0% of F.S 

Temperature Coefficients

Zero

Span

<0.05 % of F.S./°C

<0.05 % of F.S.

Warm-up Time (to within 0.2% of F.S. of steady state performance)

< 2 min

Controller Settling Time

< 2 sec

Pressure Coefficient

<0.02 % of Rdg./psi

Normal Operating Temperature Range

0°C to 50°C 

Input Voltage Required

Max. current at start-up (first 2 sec)

Typical current at seady state

±15 VDC(±5%) @ 200 mA

±15 VDC(±5%) @ 100 mA

Set Point Command Signal

0 to 5 VDC 

Output Signal

0 to 5 VDC 

Connector Types Analog

9-pin "D" Type 

Wetted Materials

Stan dard Optional

(seals and valve seat)

316L S.S. , Vition 

Leak Integrity    External (scc/sec He)

                          Through closed valve

<1 x 10(-9)

<1.0% of F.S. at 40 psig inlet to atmosphere(Toassure no flow-through, a separate positives shut-off valve is recommended.)

Fittings (compatible with)

Swagelok 4 VCR, 1/4" Swagelok