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Ｑ?。眩?191890920
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A screw type dry pump series supporting wide range of applications from clean use to hard process for semiconductor/electronic component manufacturing.
A dry pump unit combining screw type dry pump (SDE90/120) with inverter controlled Roots pump is also available.
Hard process support
Power saving
40% reduction in power consumption compared to previous product.
Nitrogen purge consumption reduction
From clean application to hard process
Etching processes
CVD processes
Sputtering
Load locks
Transfer etc.
| Type | SDE90 | SDE120 | |
|---|---|---|---|
| Maximum pumping rate(L/min) | 1,300 | 2,000 | |
| Ultimate pressureNote 1)(Pa) | 1.3 | ||
| Maximum inlet pressure | Atmospheric pressure | ||
| Maximum pumping-port pressure | Atmospheric pressure | ||
| Intake flange | NW40 | NW50 | |
| Pumping-port flange | NW40 | ||
| Cooling water | Maximum supply pressure(MPa) | 0.5 (gauge pressure) IN-OUT difference: 0.2 or greater | |
| Flow(L/min) | 4 to 8(Temperature : 10 to 25℃) | ||
| Connection port diameter | Rc3/8(with self-sealed coupler) | ||
| Nitrogen | Supply pressure(MPa) | 0.1 to 0.7(gauge pressure) | |
| Flownote2)(L/min) | 0 to 60 | ||
| Connection port diameter | 1/4"pipe joint | ||
| Power supply voltage | 3 phase 200 to 220VAC 50/60Hz | ||
| Power supply capacity(kVA) | 6.5 | ||
| Power consumptionNotenote3)(kW) | 2.8 | 3.2 | |
| Operating environment temperature range(℃) | 5 to 30℃ | ||
| Weight(kg) | 150 | 151 | |
| Dimensions L×W×H (mm) | 690×370×551 | 690×370×560 | |
| Type | SDE303A | SDE603A | SDE1203B | SDE2003B | |
|---|---|---|---|---|---|
| Pump configuration Dry Pump Roots Pump | SDE90 KMB303 | SDE90 KMB603 | SDE120 KMB1203 | SDE120 KMB2003 | |
| Maximum pumping rate(L/min) | 5,000 | 10,000 | 20,000 | 30,000 | |
| Ultimate pressureNote 1)(Pa) | 0.5 | ||||
| Maximum inlet pressure | Atmospheric pressure | ||||
| Maximum pumping-port pressure | Atmospheric pressure | ||||
| Intake flange | NW50 | NW80 | NW100 | NW160 | |
| Pumping-port flange | NW40 | ||||
| Cooling water | Maximum supply pressure (MPa) | 0.5 (gauge pressure) IN-OUT difference: 0.3 or greater | |||
| Flow(L/min) | 4 to 8 (Temperature : 10 to 25℃) | ||||
| Connection port diameter | Rc3/8 (with self-sealed coupler) | ||||
| Nitrogen | Supply pressure (MPa) | 0.1 to 0.7 (gauge pressure) | |||
| Flownote2) (L/min) | 0 to 60 | ||||
| Connection port diameter | 1/4"pipe joint | ||||
| Power supply voltage | 3 phase 200 to 220VAC 50/60Hz | ||||
| Power supply capacity (kVA) | 10.5 | 11.0 | 17.6 | ||
| Power consumption(note3)(kW) | 3.0 | 3.1 | 3.6 | 4.2 | |
| Operating environment temperature range (℃) | 5 to 30℃ | ||||
| Weight (kg) | 280 | 320 | 495 | ||
| Dimensions L×W×H (mm) | 760×400×945 | 900×400×945 | 1000×500×1165 | ||
1) Indicates value without nitrogen purge.
2) Nitrogen flow depends on application.
3) Value at ultimate pressure.
